Hexafluoroacetylacetone
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| Hexafluoroacetylacetone | |
|---|---|
| File:Hfac.png | |
| 1,1,1,5,5,5-Hexafluoro-2,4-pentanedione | |
| Other names Hexafluoroacetylacetone, HfacH | |
| style="background: #F8EABA; text-align: center;" colspan="2" | Identifiers | |
| CAS number | 1522-22-1 
|
| PubChem | 24874462 |
| style="background: #F8EABA; text-align: center;" colspan="2" | Properties | |
| Molecular formula | C5H2F6O2 |
| Molar mass | 208.06 g/mol |
| Appearance | colourless liquid |
| Density | 1.47 g/mL |
| Boiling point |
70-71 °C |
| Solubility in water | organic solvents |
| style="background: #F8EABA; text-align: center;" colspan="2" | Hazards | |
| Main hazards | toxic |
 (what is this?) (verify)Except where noted otherwise, data are given for materials in their standard state (at 25 °C, 100 kPa) | |
| Infobox references | |
Hexafluoroacetylacetone is the chemical compound with the formula CF3C(O)CH2C(O)CF3. This colourless liquid is a ligand precursor and a reagent used in MOCVD. Complexes of the conjugate base, often called Hfac-, exhibit enhanced volatility and Lewis acidity relative to analogous complexes derived from acetylacetone.
This organofluorine compound was first prepared by the condensation of ethyl ester of trifluoroacetic acid and 1,1,1-trifluoroacetone.[1] It has been investigated as an etchant for copper and its complexes, such as Cu(Hfac)(trimethylvinylsilane) have been employed as precursors in microelectronics.[2]
References
- ↑ Henne, Albert L.; Newman, Melvin S.; Quill, Laurence L.; Staniforth, Robert A. (1947). "Alkaline condensation of fluorinated esters with esters and ketones". Journal of the American Chemical Society. 69: 1819–20. doi:10.1021/ja01199a075.
- ↑ Mark J. Hampden-Smith, Toivo T. Kodas (1995). "Chemical vapour deposition of copper from (hfac)CuL compounds". Polyhedron. 14: 699–732. doi:10.1016/0277-5387(94)00401-Y.
