Hexafluoroacetylacetone

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Hexafluoroacetylacetone
File:Hfac.png
style="background: #F8EABA; text-align: center;" colspan="2" | Identifiers
CAS number 1522-22-1 YesY
PubChem 24874462
style="background: #F8EABA; text-align: center;" colspan="2" | Properties
Molecular formula C5H2F6O2
Molar mass 208.06 g/mol
Appearance colourless liquid
Density 1.47 g/mL
Boiling point

70-71 °C

Solubility in water organic solvents
style="background: #F8EABA; text-align: center;" colspan="2" | Hazards
Main hazards toxic
 YesY (what is this?)  (verify)
Except where noted otherwise, data are given for materials in their standard state (at 25 °C, 100 kPa)
Infobox references

Hexafluoroacetylacetone is the chemical compound with the formula CF3C(O)CH2C(O)CF3. This colourless liquid is a ligand precursor and a reagent used in MOCVD. Complexes of the conjugate base, often called Hfac-, exhibit enhanced volatility and Lewis acidity relative to analogous complexes derived from acetylacetone.

This organofluorine compound was first prepared by the condensation of ethyl ester of trifluoroacetic acid and 1,1,1-trifluoroacetone.[1] It has been investigated as an etchant for copper and its complexes, such as Cu(Hfac)(trimethylvinylsilane) have been employed as precursors in microelectronics.[2]

References

  1. Henne, Albert L.; Newman, Melvin S.; Quill, Laurence L.; Staniforth, Robert A. (1947). "Alkaline condensation of fluorinated esters with esters and ketones". Journal of the American Chemical Society. 69: 1819–20. doi:10.1021/ja01199a075. 
  2. Mark J. Hampden-Smith, Toivo T. Kodas (1995). "Chemical vapour deposition of copper from (hfac)CuL compounds". Polyhedron. 14: 699–732. doi:10.1016/0277-5387(94)00401-Y.