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...common to select photoresists for electron-beam exposure. [[Electron beam lithography]] usually relies on resists dedicated specifically to electron-beam exposur ...ature and pressure environments) is needed for a device.<ref name="imprint lithography">{{cite journal|doi=10.1039/b918834g|title=Rapid, cost-efficient fabricatio

With the development of microfabrication and nanotechnology, the study of microfluidics and nanofluidics are drawing ...romachining with sacrificial layers, nano-imprinting lithography, and soft-lithography.